Ethanol-sensing characteristics of pure and Pt-activated CdIn2O4 films prepared by r.f. reactive sputtering

Authors
Dong, YF Wang, WL Liao, KJ
Citation
Yf. Dong et al., Ethanol-sensing characteristics of pure and Pt-activated CdIn2O4 films prepared by r.f. reactive sputtering, SENS ACTU-B, 67(3), 2000, pp. 254-257
Citations number
7
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS B-CHEMICAL
ISSN journal
09254005 → ACNP
Volume
67
Issue
3
Year of publication
2000
Pages
254 - 257
Database
ISI
SICI code
0925-4005(20000901)67:3<254:ECOPAP>2.0.ZU;2-M
Abstract
Cadmium indium oxide (CdIn2O4, CIO) thin films were prepared by r.f. reacti ve sputtering from a Cd-In alloy target under an Ar-O-2 atmosphere in order to fabricate gas-sensing devices where Coming CG-7059 glass was used as a substrate. An ultrathin, discontinuous layer of Pt was then sputtered onto the film surface, which improved the sensor's sensibility to the ethanol ga s. The temperature dependence of sensitivity to ethanol gas for both pure a nd Pt-activated CIO films has been investigated. (C) 2000 Elsevier Science S.A. All rights reserved.