The structural and optical properties of high-quality homoepitaxial ZnTe fi
lms are investigated. A substrate surface treatment using diluted HF soluti
on plays a key role in growing device-quality ZnTe layers. X-ray diffractio
n analysis of ZnTe epilayers based on the crystal-truncation-rod method sug
gests that a homoepitaxial ZnTe film grown on a HF-treated substrate can be
regarded as an ideal truncated crystal without an interfacial layer, while
a ZnTe layer grown on a substrate without HF treatment suggests the presen
ce of an interfacial layer which may lead to degraded crystallinity of ZnTe
overlayers. The crystal quality of the homoepitaxial ZnTe layers with HF t
reatments are characterized by an extremely narrow x-ray diffraction linewi
dth of 15.6 arcsec and dominant very sharp excitonic emission lines with dr
amatically reduced deep-level emission intensity in the photoluminescence (
PL) spectrum. Three bound excitonic emission lines at neutral acceptors are
observed in the PL from the high-quality ZnTe homoepitaxial layers in addi
tion to the free-exciton emission line, suggesting the presence of three di
fferent kinds of residual acceptor impurities. (C) 2000 American Institute
of Physics. [S0003-6951(00)02635-8].