Experimental observation of a "convective cell" in electron phase space inan inductively coupled radio-frequency plasma

Authors
Kortshagen, U Heil, B
Citation
U. Kortshagen et B. Heil, Experimental observation of a "convective cell" in electron phase space inan inductively coupled radio-frequency plasma, APPL PHYS L, 77(9), 2000, pp. 1265-1267
Citations number
16
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
APPLIED PHYSICS LETTERS
ISSN journal
00036951 → ACNP
Volume
77
Issue
9
Year of publication
2000
Pages
1265 - 1267
Database
ISI
SICI code
0003-6951(20000828)77:9<1265:EOOA"C>2.0.ZU;2-S
Abstract
Spatially resolved two-dimensional Langmuir-probe measurements of energy-re solved electron fluxes have been performed in an inductively coupled radio- frequency plasma. A flux pattern reminiscent of a "convection cell" in ener gy-configuration space has been observed. The measurements are interpreted in terms of a total-energy picture of the plasma electrons. (C) 2000 Americ an Institute of Physics. [S0003-6951(00)00435-6].