This letter describes the use of supersonic cluster beam deposition (SCBD)
through a stencil mask for the fabrication of patterns of cluster-assembled
objects. Using carbon cluster beams, micrometer-size pillars and tips have
been produced on a variety of substrates. SCBD is characterized by high de
position rates, high lateral resolution, and low temperature processing. Na
nostructured objects can be produced with high aspect ratio and controlled
shapes. Micropatterning with SCBD can be of interest for applications requi
ring the integration of cluster-assembled structures with microelectronic o
r micromechanical devices. (C) 2000 American Institute of Physics. [S0003-6
951(00)03333-7].