Focused nanoparticle-beam deposition of patterned microstructures

A method was developed for fabricating nanocrystalline microstructures. Thi s method involves synthesizing nanoparticles in a thermal plasma expanded t hrough a nozzle, and then focusing the nanoparticles to a collimated beam b y means of aerodynamic lenses. High-aspect-ratio structures of silicon carb ide and titanium were deposited on stationary substrates, and lines and two -dimensional patterns were deposited on translated substrates. Linewidths e qualled approximately 50 mu m. This approach allows the use of much larger nozzles than in previously developed micronozzle methods, and also allows s ize selection of the particles that are deposited. (C) 2000 American Instit ute of Physics. [S0003-6951(00)00432-0].