Pj. Sellin et al., Imaging of charge transport in polycrystalline diamond using ion-beam-induced charge microscopy, APPL PHYS L, 77(6), 2000, pp. 913-915
Studies have been made using a 1 mu m spatial resolution ion-beam-induced c
harge (IBIC) technique of the charge transport distribution in polycrystall
ine diamond produced by chemical vapor deposition. The devices tested used
a coplanar electrode structure fabricated only on the growth side of the di
amond film, and were predominantly sensitive to charge transport close to t
he growth surface of the diamond film where the diamond crystallites are la
rgest. Irradiation with 5.48 MeV alpha particles gave a pulse height spectr
um with a broad full energy peak and a mean charge collection efficiency of
15%. IBIC images obtained using microfocus proton and alpha particle beams
showed spatially resolved regions of high charge collection efficiency cor
relating to individual diamond crystallites with a typical width of 20 mu m
, as observed by secondary electron microscopy. (C) 2000 American Institute
of Physics. [S0003-6951(00)02429-3].