Decomposition of the organometallic precursor [Sn(NMe2)(2)](2) in a control
led water/anisol mixture leads to the formation of monodisperse nanocomposi
te particles of Sn/SnOx. Full oxidation of the particles into SnO2 occurs a
t 600 degrees C without size or morphology change. These particles can be d
eposited onto silicon nitride covered microelectronic platforms and used as
sensitive layers of gas sensors. Doping of the sensors with palladium can
be achieved either by co-decomposition of organometallic precursors (doping
in volume) or by deposition of palladium on preformed SnO2 nanoparticles (
doping in surface). The doped sensors display an unusually high sensitivity
for CO sensing. (C) 2000 Elsevier Science B.V. All rights reserved.