Analysis of metal features produced by uv irradiation of organometallic films

Gold and platinum patterns have been produced by UV-induced decomposition o f a range of organometallic films. A nanosecond-pulsed excimer laser operat ing at 193 or 248 nm was used as the source of illumination. The metal ther eby formed has been extensively studied using a wide range of analytical te chniques. These include scanning and transmission electron microscopy (SEM, TEM), atomic force microscopy (AFM), and energy dispersive X-ray microanal ysis (EDX). This analysis has demonstrated that the metal is polycrystallin e with a grain size of typically 10 nm. This technique for producing high-r esolution metal patterns has wide ranging applications, especially in micro electronics. (C) 2000 Elsevier Science B.V. All rights reserved.