Nanostructures obtained by self-organization of silicon surfaces

An overview of the formation of reconstructed facets on vicinal surfaces of Si(111), Si(100) and Si(110) is given, which have been observed by using s canning tunneling microscopy (STM). Most of the samples have been prepared by mechanical grinding, subsequent chemical etching leading to concave-shap ed surfaces and by in situ treatment of high-index Si wafers. The orientati on of the experimentally observed facets are represented in a stereographic projection, which allows the recognition of more general trends in facet f ormation. Moreover, it provides information on the availability of unit cel ls in a wide range of sizes and may therefore become important for the grow th of self-organized surface structures. (C) 2000 Published by Elsevier Sci ence B.V.