Anodic films have been grown on GaInP2 at a constant applied current densit
y in phosphate solutions with pH 4, 7 and 10. XPS analysis revealed that th
e chemical composition of the anodic films formed in the solutions with pH
7 and 10 is non-uniform with In excess and corresponding Ga and P deficienc
y in outer layer. The anodic films formed in the solution with pH 4 had uni
form composition, apparently due to preferential dissolution of In in this
solution. The anodic films were stable when exposed to air for several week
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