Thermal modeling of selective area laser deposition of titanium nitride ona finite slab with stationary and moving laser beams

A thermal model of selective area laser deposition of titanium nitride on a finite slab under irradiation by a stationary or a moving laser beam is pr esented in this paper. Heat transfer in the substrate and gases, the chemic al reaction on the substrate's top surface, and the mass transfer of gases in the chamber were taken into account in the model. For the cases of the s tationary laser beam, the predicted deposited film profile was in good agre ement with the experimental results. For the cases of the moving laser beam , the deposited film became higher and wider when the scanning velocity was decreased or the laser power was increased. Because of the low sticking co efficient of TiN at high temperature, a groove appeared on the top of the d eposited film when high laser power was applied. (C) 2000 Elsevier Science Ltd. All rights reserved.