Molybdenum carbide prepared by chemical vapor deposition

Molybdenum carbide was synthesized on a quartz plate using a hot-wall chemi cal vapor deposition reactor, in a stream of MoCl5, benzene, hydrogen and a rgon at temperatures from 1000 to 1050 K and a total pressure of 230 Pa. Th e molybdenum carbides were analyzed by X-ray diffraction and X-ray photoele ctron spectroscopy. beta-Mo2C was formed predominantly on the quartz plate at 1000 K and the molybdenum metal (110) phase was observed along with beta -Mo2C at 1050 K. The thickness of molybdenum carbides increased in the temp erature range from 1000 to 1050 K but the atomic ratio, C 1s (carbidic carb on) to Mo 3d of molybdenum carbides, gradually decreased.