Characterization of crystalline TiC films grown by pulsed Nd : YAG laser deposition

Titanium cal bide (TiC) thin films have been grown on Si (100) substrates u sing a pulsed neodymium: yttrium-aluminum-garnet (Nd:YAG) laser deposition method. X-ray diffraction (XRD) pattern of the TiC film shows that substrat e temperature is one of the most important parameters in the fabrication of crystalline TiC film. Crystalline TiC films can be prepared at substrate t emperatures above 500 degrees C. Field emission scanning electron microscop e (FE-SEM) indicates that the surface of the film is very smooth and pinhol e-free.