Arrangement of nanosized ceramic particles on self-assembled monolayers

The fabrication of novel micro/nano-sized devices by assembling inorganic p articles is anticipated for future microelectronics which will make use of their attractive functions. The surface modification of self-assembled mono layers (SAMs) was studied to prepare templates for sphere assembly. Phenyl groups of SAM were modified into silanol groups by UV irradiation through a photomask, by applying an electric current using an atomic force microscop e (AFM) probe, or by contact pressure with a diamond tip. They were used as templates to arrange fine inorganic particles. In addition to the formatio n of ester bonds, siloxane bond formation between spheres and SAMs was also found to be effective for sphere arrangement. Low-dimensional close-packin g of SiO2 spheres was achieved through the formation of siloxane bonds. The two-dimensional arrangement of functional particles on SAMs in a controlle d manner through the formation of strong chemical bonds, such as ester bond s or siloxane bonds, can be applied to the microfabrication of ceramic devi ces.