Calcium-modified lead titanate (PCT) thin film pyroelectric infrared (IR) d
etectors were fabricated on Pt(111)/SiO2/Si(100) substrates using a diol-ba
sed sol-gel process. The randomly oriented PCT thin film, which has not und
ergone the poling treatment, exhibits a relatively small dielectric constan
t and a large pyroelectric coefficient. The pyroelectric properties of PCT
thin film point detectors with various Ca contents on modulation frequency
are measured and compared. The optimized composition of PCT thin film IR de
tectors was found to be the PCT(25), which exhibits a large voltage respons
ivity of 4533 (V/W) at 20 Hz and a specific detectivity (D*) of 6.45 x 10(7
) cmHz(1/2)/W at 100 I-It. The results show that Pb1-xCaxTiO3 thin film wit
h x = 0.25 [PCT(25)] was most suitable for application to the pyroelectric
thin film IR detector.