Low-temperature crystallization of metal organic decomposition BaTiO3 thinfilm by hydrothermal annealing

BaTiO3 (BTO) thin films with perovskite structure have been prepared on Ti/ Pt/Ti/SiO2/Si substrate using a combined process of conventional metal orga nic decomposition (MOD) process and a hydrothermal method. BTO thin films w ith poly-crystalline structure are obtained on silicon at processing temper atures lower than 200 degrees C. X-ray diffraction patterns show that well- developed crystallites with a pure perovskite phase have been formed. Scann ing electron microscopy (SEM) and Raman spectroscopy results show that the structure of as-treated BTO thin film strongly depends on the hydrothermal treatment temperature.