Silver oxide (AgOx) was recently proposed as a new mask material to realize
a scattering-mode super-resolution near-held structure (Super-RENS). To ob
tain a further understanding of the influence of the Ge2Sb2Te5 recording la
yer on the characteristics of scattering-mode Super-RENS, oxygen (O-2)-dope
d GeSbTe films are examined in this study. The crystallization temperature
T-c of the GeSbTe-(O) films increased with the O-2 flow ratio and was impro
ved to 200 degrees C at the O-2 flow ratio of 0.1, It was found that light
O-2 doping could improve the super-resolution to 80 nm and the readout dura
bility against readout cycles in the scattering-mode Super-RENS could be gr
eatly improved by light and heavy O-2 doping into GeSbTe films.