Dielectric properties of internal capacitors in co-fired ceramic substrates

Dielectric properties of barium titanate-based internal capacitors characte rized by capacitance, dissipation factor, and temperature change in capacit ance are reported. A capacitance of about 10 nF/cm(2) with the dissipation factor of 2.3% is obtained for the BaTi0.975O3 + 2 wt% LiF internal capacit or after being co-fired with low dielectric constant ceramic substrates at 900 degrees C. The percent change of capacitance is confined within +/-10%. The dissipation factor is stable and decreases with increasing temperature .