Low-energy electron diffraction and X-ray photoelectron spectroscopy studies of Sb-induced reconstruction on Si(113)3 x 2 surface

We investigated Sb-induced reconstruction on a Si(113)3 x 2 surface using l ow-energy electron diffraction (LEED) and X-ray photoelectron spectroscopy (XPS). Depending on the annealing temperature and Sb coverage, 1 x 1, 1 x 2 + 2x,2 x 2, and 2 x 5 structures were observed. The 2 x 2 and 2 x 5 struct ures showed reversible phase transitions to 1 x 2 and 1 x 5 structures resp ectively at high temperature. The relative Sb coverages of the 1 x 1 and 2 x 2 structures formed by annealing at about 400 and 700 degrees C were meas ured from Sb 3d/Si 2p core-level XPS intensity ratios.