Step bunching on vicinal Si(lll) surfaces induced by direct current heating
has been studied using an in situ light scattering measurement system. For
annealing at 1240 degrees C, the average terrace width increased as a powe
r of the annealing time with an exponent of 0.50 +/- 0.03 in the range of 3
-14 mu m. During the step bunching process, the ratio of the standard devia
tion of the terrace width to the average terrace width remained constant at
0.24. Light scattering in the course of debunching was also observed.