Energy distribution of ions and fast neutrals in microdischarges for display technology

In this work we present simple theoretical predictions as well as full Mont e Carlo calculations of the energy distribution of the ion and fast neutral fluxes impinging on the materials that surround the microdischarges in pla sma display panels and plasma addressed liquid crystal displays. We conside r various rare gas ion species in different microdischarge designs. Often s imple theoretical distribution functions are in good agreement with the res ults of Monte Carlo calculations. Under the influence of symmetric charge t ransfer collisions the ion energy distribution is essentially different fro m a Maxwellian distribution, and the ion motion is strongly orientated alon g the electric field. The flux of the fast neutrals formed by symmetric cha rge transfer is usually even larger than the ion flux itself. (C) 2000 Amer ican Institute of Physics. [S0021-8979(00)10417-7].