Analyses of edge effects on residual stresses in film strip/substrate systems

The residual stress distribution in a thin-film strip overlaid on a substra te is influenced by the edges of the strip. An analytical model is develope d to derive a closed-form solution for the stress distribution along the fi lm width. Because the film is much thinner than the substrate, the stress v ariation through the film thickness is ignored; however, the stress variati on through the substrate thickness is considered in the analysis. Compared to the existing analytical models, the present model is more rigorous and t he analytical results agree better with both finite element results and exp erimental measurements. (C) 2000 American Institute of Physics. [S0021-8979 (00)02218-0].