EXPERIENCES IN DEVELOPMENT OF ION GETTER VACUUM PUMP

During recent years high and ultrahigh vacuum environment has become m ore and more interesting for special as well as for manufacturing purp oses. To generate such a clean vacuum space the ion getter pumps are o ne of the possibilities. Although they are not very complicated device s, if manufactured some unpleasant ultrahigh vacuum and high volltage conditions are encountered. To assure a good working of an ion getter pump under extreme conditions only very low degassing and leaking rate s are required. The possibility of using material is strongly restrict ed and extreme cleanness and special joining or sealing techniques are needed. The paper gives a short survey of our efforts in avoiding the mentioned problems during the development of an ion getter pump of 12 0 L size.