Iz. Machi et al., HYDROGEN MOBILITY IN DIAMOND STUDIES USING HI-ERDA MICROSCOPY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 127, 1997, pp. 212-216
Hydrogen plays a significant role in the growth of diamond and in the
determination of its physical, electrical and optical properties. Howe
ver, despite this significance, the configuration, chemistry and behav
iour of hydrogen in the diamond lattice is still not very well underst
ood. In this work, the stability of a collimated hydrogen implant dist
ribution, as well as the intrinsic hydrogen distribution in a single c
rystal natural type IIa diamond are studied by imaging with the micro-
scanned Heavy-Ion Elastic Recoil Detection Analysis (mu HI-ERDA) techn
ique in three dimensions, To investigate possible trapping of hydrogen
at vacancies a shallow pre-damaged layer was created between the impl
anted hydrogen distribution and the surface by collimated bombardment
of the sample with 50 keV C-12 ions. NO evidence of migration of the i
mplanted or the intrinsic hydrogen to the pre-damaged region was obser
ved even after annealing at 1473 K. The stability of the implanted hyd
rogen indicates the deep trapping of this species within its own impla
nted range distribution. The results confirm similar measurements prev
iously performed on a natural type Ia diamond as well as on a syntheti
c type Ib diamond. The current sample was exceptionally pure, enabling
an extension of these measurements to a situation where the intrinsic
hydrogen concentration, as well as the hydrogen trapping behaviour mi
ght be expected to be different. Our results suggest complex trap conf
igurations for hydrogen in diamond, not necessarily associated with ni
trogen related defects.