Monolayer assemblies on silicon surfaces are of interest for a number of te
chnological reasons. Here, we present a novel, two-step strategy for assemb
ly formation directly on silicon surfaces. In the first step, a H-terminate
d Si(100) or Si(111) surface reacts with Cl-2 to give a Cl-capped surface.
In the second step, the CI-Si surface is immersed in an alcohol/isooctane s
olution for monolayer formation via Si-O linkages, with the removal of surf
ace Cl likely in the form of HCl. This reaction mechanism is confirmed by X
-ray photoelectron spectroscopy. X-ray reflectivity measurement shows that
the thickness of the monolayer film is close to molecular dimension and the
density is about 85% of that in crystalline paraffine. Fourier transform i
nfrared spectroscopy and water contact angle measurements suggest that the
alkyl chains within the monolayer possess, to a limited degree, conformatio
nal order. Atomic force microscopy image with molecular lattice resolution
shows intermolecular distance corresponding to close packing of alkyl chain
s. The monolayer coatings show both chemical and mechanical stability. The
possible mechanism for monolayer assembly formation on covalent Si surfaces
is discussed.