EFFECT OF ION CURRENT-DENSITY ON THE PHASE-COMPOSITION OF ION-BEAM SYNTHESIZED IRON SILICIDES IN SI(100)

Authors
GUMAROV GG PETUKHOV VY SHUSTOV VA KHAIBULLIN IB
Citation
Gg. Gumarov et al., EFFECT OF ION CURRENT-DENSITY ON THE PHASE-COMPOSITION OF ION-BEAM SYNTHESIZED IRON SILICIDES IN SI(100), Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 127, 1997, pp. 321-323
Citations number
7
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
127
Year of publication
1997
Pages
321 - 323
Database
ISI
SICI code
0168-583X(1997)127:<321:EOICOT>2.0.ZU;2-R
Abstract
Phase composition of Fe+ implanted in Si(100) at elevated temperatures was investigated over a wide range of ion current densities. Phases a nd texture were determined by glancing angle XRD. Both FeSi and beta-F eSi2 phases were observed. The phase composition of the synthesized la yers was found to be strongly affected by ion current density. The inc rease of the ion current density at an implantation temperature of 450 degrees C leads to a rise in relative content of beta-FeSi2. This eff ect is explained by the spreading of the Fe profile. Such changes of t he profile are the result of the radiation enhanced diffusion during i mplantation.