LOSS MEASUREMENTS AND STOICHIOMETRIC DEPENDENCE OF TI AND O IMPLANTEDLINBO3 WAVE-GUIDES

Authors
WILLIAMS EK ILA D SARKISOV S VENKATESWARLU P POKER DB HENSLEY DK
Citation
Ek. Williams et al., LOSS MEASUREMENTS AND STOICHIOMETRIC DEPENDENCE OF TI AND O IMPLANTEDLINBO3 WAVE-GUIDES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 127, 1997, pp. 512-514
Citations number
11
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
127
Year of publication
1997
Pages
512 - 514
Database
ISI
SICI code
0168-583X(1997)127:<512:LMASDO>2.0.ZU;2-C
Abstract
Planar waveguides created by the implantation at 500 degrees C of 2.5 x 10(17) Ti ions/cm(2) and 2.5, 5.0 and 7.5 x 10(17) O ions/cm(2) have been characterized for loss by the scattered light and cutback techni ques, Results indicate losses of less than 2.5 dB/cm to 3 dB/cm for wa veguides with a Ti:O ratio of 1:3 and losses of over 7 dB/cm2 for wave guides with Ti:O ratios of I: 1 and 1:2.