G. Rizza et al., ION-BEAM MIXING OF METAL-INSULATOR MULTILAYERS - A PROMISING TECHNIQUE FOR THE FORMATION OF METALLIC NANOPHASES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 127, 1997, pp. 574-578
The presence of metallic nanoclusters in an insulating matrix leads to
non-linear optical properties with potential applications in optoelec
tronics. Ion implantation is currently used to produce such a composit
e material with limitations inherent to the implantation process, part
icularly concerning the doped thickness and the homogeneity of the tra
nsformed layer. Here we show that high-energy ion-beam mixing can be a
pplied as an alternative ion beam technique to form metallic nanoclust
ers without the drawbacks of direct ion implantation. Thin SiO2-metal
multilayers were irradiated at room temperature with MeV heavy ions in
order to produce an homogeneous SiO2 layer containing metallic nanocl
usters over the whole sample thickness. The present works deals with t
he mechanism lending to the formation of metallic nanophases by ion-be
am mixing.