Ia. Faizrakhmanov et al., OPTICAL AND ELECTRICAL-PROPERTIES OF C-IMPLANTED AMORPHOUS DIAMOND-LIKE CARBON-FILMS(), Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 127, 1997, pp. 719-722
Optical and electrical properties of diamond-like carbon (DLC) films i
rradiated by C+ ions with energy 20 keV in the dose range from 1 x 10(
14) to 1.2 x 10(17) cm(-2) were investigated. It was shown that the de
pendence of the optical gap E-g on the irradiation dose D can be expla
ined by radiation-stimulated growth of pi-clusters. The temperature de
pendence of the electroresistivity of implanted DLC films in the range
of 20-300 K was fitted by the expression R(T) proportional to exp(T-0
/T)(n), where 1/4 less than or equal to n less than or equal to 1/2. T
his indicates the variable range hopping mechanism of conductivity. Th
e analysis of the kinetics of the change of T-0 with irradiation dose
also suggested that the size of pi-clusters increases, which agrees wi
th the conclusion made from optical measurements.