Phase recognition in AlN-Ti system by energy dispersive spectroscopy and electron backscatter diffraction

The combination of energy dispersive spectroscopy (EDS) and electron backsc atter diffraction (EBSD) techniques in scanning electron microscope was emp loyed to characterize the reacted interface between Ti matrix and AIN parti cles. Due to the high localization of EDS and EBSD, representative measurem ents of chemical composition and reliable determination of the crystal stru cture were possible for each phase in the reaction zone with complex morpho logy. The TiN1-x (cubic, NaCl type), Ti3AlN (cubic, perovskite type) and Ti -rich Ti3Al (hexagonal, Ni3Sn type) phases were identified in the reaction zone after annealing at 1100 degrees C. EDS+EBSD combination is an efficien t tool for phase analysis at the interface in reactive multicomponent syste ms.