PREPARATION OF THIN-FILMS BY FILTERED ARE DEPOSITION AND ION-ASSISTEDARC DEPOSITION

Authors
ZHAO JP WANG X CHEN ZY YANG SQ SHI TS LIU XH ZOU SC
Citation
Jp. Zhao et al., PREPARATION OF THIN-FILMS BY FILTERED ARE DEPOSITION AND ION-ASSISTEDARC DEPOSITION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 127, 1997, pp. 817-820
Citations number
11
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
127
Year of publication
1997
Pages
817 - 820
Database
ISI
SICI code
0168-583X(1997)127:<817:POTBFA>2.0.ZU;2-T
Abstract
The present work focuses on Filtered Are Deposition (FAD) and Ion Assi sted Are Deposition (IAAD) techniques. The properties of TIN, a-diamon d and a-C:N films prepared by FAD and IAAD have been investigated in r espect to surface morphologies, field emission behavior and optical pr operties.