LAYERED STRUCTURE DIAGNOSTIC AND OPTICAL MODELING OF C-BN FILMS

Boron nitride films were deposited using ion beam assisted deposition and examined with polarised infrared reflection spectroscopy. The obta ined spectra were analysed with a multilayer model (cubic BN on top of non-cubic BN) regarding the anisotropy of hexagonal BN. Though, it wa s possible to determine the distinct layer thicknesses, the cubic volu me fraction of the toplayer, a preferential orientation of the erected basal planes of the h-BN interlayer, as well as various phonon parame ter. This technique affords new insights of the c-BN growth process in contrast to the established infrared peak ratios.