InGaN(0001) surfaces prepared by molecular beam epitaxy have been studied u
sing scanning tunneling microscopy and first-principles total energy calcul
ations. Nanometer-size surface structures are observed consisting of either
vacancy islands or ordered vacancy rows. The spontaneous formation of thes
e structures is shown to be driven by significant strain in the surface lay
ers and by the relative weakness of the In-N bond compared to Ga-N. Theory
indicates that In will preferentially bind at the edges and interior of the
structures, thereby giving rise to an inhomogeneous In distribution at the
surface.