Dynamics of inductively-coupled pulsed chlorine plasmas in the presence ofcontinuous substrate bias

Authors
Malyshev, MV Donnelly, VM
Citation
Mv. Malyshev et Vm. Donnelly, Dynamics of inductively-coupled pulsed chlorine plasmas in the presence ofcontinuous substrate bias, PLASMA SOUR, 9(3), 2000, pp. 353-360
Citations number
21
Categorie Soggetti
Physics
Journal title
PLASMA SOURCES SCIENCE & TECHNOLOGY
ISSN journal
09630252 → ACNP
Volume
9
Issue
3
Year of publication
2000
Pages
353 - 360
Database
ISI
SICI code
0963-0252(200008)9:3<353:DOIPCP>2.0.ZU;2-4