TITANIUM-OXIDE THIN-FILMS FOR NH3 MONITORING - STRUCTURAL AND PHYSICAL CHARACTERIZATIONS

Titanium oxide thin films have been deposited by thermal evaporation i n vacuum and then have been analyzed before and after a suitable therm al annealing in order to test their application in NH3 gas-sensing tec hnology. In particular, spectrophotometric and conductivity measuremen ts have been performed in order to determine the optical and electrica l properties of titanium oxide thin films. The structure and the morph ology of such material have been investigated by high resolution elect ron microscopy and small area electron diffraction. (C) 1997 American Institute of Physics.