SiC layers on silicon have been investigated by photothermal radiometr
y to study the influence of infrared emission spectra on the photother
mal signal behavior. This was done by placing different band pass filt
ers in front of the infrared detector. Because of the small amplitude
of the obtained infrared signal, background contributions must be elim
inated. A technique to correct the data with respect to background is
presented and experimentally tested. (C) 1997 American Institute of Ph
ysics.