Practical inverse modeling with SIESTA

We present a simulation system which meets the requirements for practical a pplication of inverse modeling in a professional environment. A tool interf ace for the integration of arbitrary simulation tools at the user level is introduced and a methodology for the formation of simulation networks is de scribed. A Levenberg-Marquardt optimizer automates the inverse modeling pro cedure. Strategics for the efficient execution of simulation tools are disc ussed. An example demonstrates the extraction of doping profile information on the basis of electrical measurements.