Wx. Que et al., Sol-gel processed silica/titania/y-glycidoxypropyltrimethoxysilane composite materials for photonic applications, J ELEC MAT, 29(8), 2000, pp. 1052-1058
Silica/titania/y-Glycidoxypropyltrimethoxysilane composite materials proces
sed by the sol-gel technique were studied for photonic applications. Wavegu
ide thin films with thickness more than 1.7 mu m were prepared by the sol-g
el spin coating technique and low temperature heat treatment from this high
titanium content composite materials. The films were analyzed by atomic fo
rce microscopy (AFM), ellipsometry, differential thermal analysis (DTA), th
ermal gravimetric analysis (TGA), UV-visible spectroscopy (UV-VIS), and Fou
rier transform infrared (FT-IR) spectroscopy. It was observed that the film
becomes thinner as the titanium contents increase. A change of the refract
ive index through the range 1.52-1.61 at the optical wavelength of 633 nm w
as achieved by varying the molar ratio between silica and titanium. A dense
, low absorption, and high transparency in the visible range waveguide film
s could be obtained at a low temperature. It was also noted that organic co
mpounds in the film would decompose in the temperature range from 200 degre
es C to 480 degrees C. Accordingly, purely inorganic silica-titania films w
ith a thickness of about 0.7 mu m could also be obtained by a single-coatin
g process, when the film was baked at a temperature of 500 degrees C or hig
her. The waveguides properties and photonic applications of the composite m
aterial sol-gel films were also investigated.