By exploiting the relatively high volatility of In etch products in CH4/H-2
discharges, we were able to obtain a maximum selectivity for InGaP over Ga
As of similar to 20 at low ion energies and fluxes. Three different inert g
as additives to CH4/H-2 were examined, with Ar producing higher selectiviti
es than He or Xe. This process is attractive for selective removal of the I
nGaP emitter in the fabrication of heterojunction bipolar transistors.