This paper presents a comprehensive study of the effects of annealing silic
on dioxide encapsulated CdSe films in oxygen on the microstructure, resisti
vity, photosensitivity and energy levels. The energy levels were investigat
ed by using the independent methods of thermally stimulated current, photoc
urrent spectral response, and Hall measurements. The film structure is wurt
zite with grains of average size 0.35 mu m, which extend through the thickn
ess of the films. Annealing the films in oxygen at 450 degrees C increases
the resistivity from 10 ohm cm to 10(6) ohm cm. The electron mobility, whic
h has an activation energy of 0.08 eV, remains constant at about 100 cm(2)
V-1 s(-1) during the anneal steps. The change in the resistivity is due to
a combination of thermal rearrangement and oxygen diffusing uniformly into
the films. Various energy levels ranging from 0.11 eV to 1.3 eV were detect
ed and the density of all these decreased on annealing.