The properties of annealed AlN films deposited by pulsed laser deposition

AlN films deposited on SiC or sapphire substrates by pulsed laser depositio n were annealed at 1200 degrees C, 1400 degrees C, and 1600 degrees C for 3 0 min in an inert atmosphere to examine how their structure, surface morpho logy, and substrate-film interface are altered during high temperature ther mal processing. Shifts in the x-ray rocking curve peaks suggest that anneal ing increases the film density or relaxes the films and reduces the c-axis Poisson compression. Scanning electron micrographs show that the AlN begins to noticeably evaporate at 1600 degrees C, and the evaporation rate is hig her for the films grown an sapphire because the as-deposited film contained more pinholes. Rutherford backscattering spectroscopy shows that the inter face between the film and substrate improves with annealing temperature for SiC substrates, but the interface quality for the 1600 degrees C anneal is poorer than it is for the 1400 degrees C anneal when the substrate is sapp hire. Transmission electron micrographs show that the as-deposited films on SiC contain many stacking faults, while those annealed at 1600 degrees C h ave a columnar structure with slightly misoriented grains. The as-deposited films on sapphire have an incoherent interface, and voids are formed at th e interface when the samples are annealed at 1600 degrees C. Auger electron spectroscopy shows that virtually no intermixing occurs across the interfa ce, and that the annealed films.