Range straggling and lateral spread of MeV Au+ ions in LiB3O5 and SiN1.375H0.603

Both LiB3O5 and SiN1.375H0.603 were implanted by 1.0 MeV Au+ ions to a dose of 5 x 10(15) ions cm(-2) under different angles. The range straggling and lateral spread of 1.0 MeV Au+ ions in both LiB3 O-5 and SiN1.375H0.603 wer e investigated by the Rutherford backscattering of 2.1 MeV He2+. The experi mental mean projected range, range straggling and lateral spread are 279.7 nm, 54.0 nm and 34.6 nm for the case of LiB3O5, and 222.3 nm, 54.6 mn and 3 1.5 nm for the case of SiN1.375H0.603. The results show that the experiment al range straggling and lateral spread are much larger than the values pred icted by the 1998 version of the Transport of Inns in Matter code (TRIM98). After inelastic effects have been included in nuclear stopping regime, the re is a much closer agreement with the experimental values than the origina l TRIM98 codes have. The maximum differences of the mean projected range, r ange straggling and lateral spread between experimental and calculated valu es are less than 3%, 24% and 21%, respectively for both cases.