An analysis of the vector wave equation was conducted. A class of self-simi
lar solutions with inhomogeneous polarization corresponding to the resonato
r modes is deduced. The modes with inhomogeneous polarization can be select
ed by a diffraction element with polarization selectivity used as one of th
e resonator mirrors. Diffraction elements with high polarization selectivit
y of about 100% are necessary for generating 'pure' radially polarized mode
s. The radially polarized beam provides a higher energy efficiency (the pro
duct of the depth of the cut by the cutting velocity) for laser cutting met
als than the circularly polarized main mode does under the same conditions.
The two limiting cases of resonance absorption on the spherical plasma tar
get could be realized using axially polarized beams: the resonance absorpti
on is maximum in the case of radial polarization and does not occur in the
case of azimuthal polarization.