Capacitive ultrasonic transducer with net backplate

Citation
P. Mattila et al., Capacitive ultrasonic transducer with net backplate, MEAS SCI T, 11(8), 2000, pp. 1119-1125
Citations number
11
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
MEASUREMENT SCIENCE & TECHNOLOGY
ISSN journal
09570233 → ACNP
Volume
11
Issue
8
Year of publication
2000
Pages
1119 - 1125
Database
ISI
SICI code
0957-0233(200008)11:8<1119:CUTWNB>2.0.ZU;2-6
Abstract
A study is presented of the function of an air-coupled capacitive ultrasoni c transducer with uniform net backplate. Net backplates are an easy, fast-t o-assemble alternative to grooved backplates. The frequency responses of th e transducers were measured and the resonance frequencies were estimated. A procedure to study the electrostatics of the transducer with net backplate geometry is described with calculations of surface charge density distribu tion, capacitance and sensitivity.