He+ Rutherford backscattering spectrometry has been applied to measure the
absolute saturation coverage of Cs on the Si(100)-2 x 1 surface at room tem
perature. The measured Ca saturation coverage is 0.54+/-0.02 monolayers (ML
) [1 ML is the density of surface atoms for bulk-terminated Si(100), or 6.7
8 x 10(14)atoms/cm(2)]. This result supports structural models requiring a
Cs coverage of 0.5 ML and refutes several alternative models.