The procedures of preparation of heptamethylcyclotetrasiloxane (CH3)(7)Si4O
4H in a 60% yield, its exhaustive purification, and its chlorination to for
m (CH3)(7)Si4O4Cl in a quantitative yield were developed. The composition o
f heptamethylchlorocyclotetrasiloxane and the content of alkali and heavy m
etal impurities in this compound, permissible for materials used in electro
nics, were determined by elemental analysis, gas-liquid chromatography, fla
me photometry, and atomic absorption analysis.