Study of the radiative heating for deposition of high-T-c superconducting thin films

Citation
Vn. Tsaneva et al., Study of the radiative heating for deposition of high-T-c superconducting thin films, VACUUM, 58(2-3), 2000, pp. 454-463
Citations number
6
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
VACUUM
ISSN journal
0042207X → ACNP
Volume
58
Issue
2-3
Year of publication
2000
Pages
454 - 463
Database
ISI
SICI code
0042-207X(200008/09)58:2-3<454:SOTRHF>2.0.ZU;2-T
Abstract
It is well recognized that one of the key problems in high-T-c superconduct ing (HTS) thin-film preparation is maintaining required space - and time-te mperature distribution over the substrate. Our experience in HTS thin-film deposition, using a radiative heater showed that the results are extremely sensitive to the emissive surface flatness. This surface may become corruga ted due to the thermal expansion of the heated foil during the deposition r un. We present an analytical description of the possible deviation from uni form temperature distribution over the substrate in a radiative heater with a current-heated metal alloy foil as an emissive source. (C) 2000 Elsevier Science Ltd. All rights reserved.