J. Akedo et M. Lebedev, Piezoelectric properties and poling effect of Pb(Zr, Ti)O-3 thick films prepared for microactuators by aerosol deposition, APPL PHYS L, 77(11), 2000, pp. 1710-1712
Crack-free [Pb(Zr-0.52, Ti-0.48)O-3] (PZT) films with more than 10 mu m thi
ckness as the piezoelectric material, were formed on stainless-steel (SUS30
4) and Pt/Ti/SiO2/Si substrates by aerosol deposition and then annealed at
600 degrees C in air. The deposition rate was 20 mu m/min in an area of 5x5
mm(2). To estimate the piezoelectric and mechanical properties of PZT film
s, a unimorph structured PZT and a free-standing cantilever were fabricated
. The Young's modulus (Y-11) of the PZT film was 80 GPa. Poling at 40 kV/cm
, 250 degrees C for 20 min increased the properties by a factor of 4.0-5.5,
resulting in the piezoelectric coefficient (-d(31)) varying from 80 to 180
pm/V. (C) 2000 American Institute of Physics. [S0003- 6951(00)03237-X].