The effect of longitudinal substrate currents on the losses in silicon substrate coplanar-strip and coplanar waveguides

Authors
Berg, H Gevorgian, S
Citation
H. Berg et S. Gevorgian, The effect of longitudinal substrate currents on the losses in silicon substrate coplanar-strip and coplanar waveguides, INT J RF MI, 10(5), 2000, pp. 284-288
Citations number
18
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING
ISSN journal
10964290 → ACNP
Volume
10
Issue
5
Year of publication
2000
Pages
284 - 288
Database
ISI
SICI code
1096-4290(200009)10:5<284:TEOLSC>2.0.ZU;2-3
Abstract
The strip currents in silicon substrate CPS and CPW induce longitudinal cur rents in the substrate (along the strips of the lines) causing extra microw ave losses. It is shown that these losses may be minimized without introduc ing extra masks and process steps if the slot widths in the lines are chose n properly. (C) 2000 John Wiley & Sons, Inc.