Using near-field techniques, we have developed an experimental set-up for s
patially resolved cathodoluminescence (CL) spectroscopy and monochromatic i
maging. It combines a scanning near-field optical/force microscope with a s
canning electron microscope equipped with a field emission gun. The potenti
alities of this scanning near-field cathodoluminescence microscope are demo
nstrated on two kinds of sample: an indented MgO crystal and AlGaN/GaN quan
tum wells grown on GaN/sapphire. Monochromatic CL imaging allows a clear di
stinction between the emission of quantum wells and the GaN substrate, and
for the MgO crystal, the localization on the slip bands, near the indentati
on, of luminescent centres emitting at 450 nm.